レーザ走査方式表面形状検査機”CSYS”。広い測定範囲の表面を超高感度で短時間で測定!

産学共同研究開発・論文

論文

1Ryo Shinozaki, 3Osami Sasaki, and 3Takamasa Suzuki, “Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam,” Appl. Opt. 43, 4157-4163 (2004)[Abstract]

会議

2Thet Naing Oo, 2Yasuyuki Ohta, 2Norihiko Tanaka, 1Tetsuya Iwata, 2Munehiro Kimura and 2Tadashi Akahane, “Study on surface alignment of liquid crystal multilayers evaporated on photoalignment polyvinylcinnamate film,” in the Proceeding of The 5th International Symposium on Eco-Materials Processing & Design (ISEPD 2004),
, Ngaoka, Niigata JAPAN, (January 2004) [Abstract]

1篠崎亮, 3佐々木修己, 3鈴木孝昌, “高速走査法を用いたレーザ光束角度振れ検出による1次元表面形状測定装置,” 2004年春季第51回応用物理学関係連合講演会, 28p-R-13, 東京, (2004年3月)[Abstract]

2Munehiro Kimura, 1Tetsuya Iwata and 2Tadashi Akahane, “Novel surface profiler system for inspection of flat panel display,” The 24th International Display Research Confernce (IMID’ 04), 18.2, Daegu, KOREA, (August 2004)[Abstract]

2Thet Naing Oo, 1Tetsuya Iwata, 2Munehiro Kimura and 2Tadashi Akahane, “Investigation of the surface alignment of liquid crystal multilayers evaporated on photoalignment polyimide film,” 2004年日本液晶学会討論会, PA04, 名古屋, (September 2004)[Abstract]

1Ryo Shinozaki, 3Osami Sasaki, and 3Takamasa Suzuki, “One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam,” in Photonics ASIA, 5633-05, Beijing, China, (November 2004) .[Abstract]

1篠崎亮, 3佐々木修己, 3鈴木孝昌, “レーザビーム光束走査法を用いたOPC ドラム基板表面形状検査装置,” 2005年春季第52回応用物理学関係連合講演会, 31p-ZF-15, 埼玉 (2005年3月) [Abstract]

1篠崎亮, 3佐々木修己, 3鈴木孝昌, “レーザビーム高速走査法を 用いたOPCドラム基板のためのインプロセス非接触形状特性検査装 置,” 2005年度精密工学会秋季大会, K63, 京都 (2005年9月)[Abstract]

  • 1.Core System Co.,Ltd. 2-2-2 Nakajima, Nagaoka, Niigata 940-0094 Japan
  • 2.Department of Electrical engineering, Nagaoka University of Technoloty, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan
  • 3.Faculty of Engineering, Niigata University, 8050 Ikarashi 2, Niigata, 950-2181, Japan